oxygen-gas plasma stripping
- oxygen-gas plasma stripping
- fotorezisto šalinimas deguonies plazmoje
statusas T sritis radioelektronika
atitikmenys: angl. oxygen-gas plasma stripping
vok. Ablösen des Resists im Sauerstoffplasma, n
rus. удаление фоторезиста в кислородной плазме, n
pranc. élimination du photorésist en plasma d'oxygène, f
Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“.
Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas.
2000.
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Ablösen des Resists im Sauerstoffplasma — fotorezisto šalinimas deguonies plazmoje statusas T sritis radioelektronika atitikmenys: angl. oxygen gas plasma stripping vok. Ablösen des Resists im Sauerstoffplasma, n rus. удаление фоторезиста в кислородной плазме, n pranc. élimination du… … Radioelektronikos terminų žodynas
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